Cercetări experimentale privind obţinerea peliculelor de oxizi pe suprafeţele semiconductoare cu aplicarea plasmei [Articol]

Topală, Pavel; Rusnac, Vladislav; Guzgan, Dorin; Ojegov, Alexandr

Please use this identifier to cite or link to this item: http://dspace.usarb.md:8080/jspui/handle/123456789/1668

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DC Field	Value	Language
dc.contributor.author	Topală, Pavel	-
dc.contributor.author	Rusnac, Vladislav	-
dc.contributor.author	Guzgan, Dorin	-
dc.contributor.author	Ojegov, Alexandr	-
dc.date.accessioned	2016-03-11T11:15:23Z	-
dc.date.available	2016-03-11T11:15:23Z	-
dc.date.issued	2015	-
dc.identifier.citation	Cercetări experimentale privind obţinerea peliculelor de oxizi pe suprafeţele semiconductoare cu aplicarea plasmei / Pavel Topală, Vladislav Rusnac, Dorin Guzgan, Alexandr Ojegov // Tradiţie şi inovare în cercetarea ştiinţifică, Ediţia a 5-a : Materialele Colloquia Professorum din 10 octombrie 2014. – Bălţi. – 2015. – P. 212-217.	ro
dc.identifier.uri	http://dspace.usarb.md:8080/jspui/handle/123456789/1668	-
dc.description.abstract	The paper presents the results of experimental investigations aimed at the formation of thin oxide films on semiconductor surfaces by plasma applying. The morphology of obtained films depending on the electrode base material is examined. A special interest presents clusters formed on the semiconductor surfaces after processing, which highlights new properties that differ from the properties of the separate molecules and of the base material.	en
dc.language.iso	ro	ro
dc.publisher	USARB	ro
dc.rights	Attribution-NonCommercial-NoDerivatives 4.0 Internațional	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/4.0/	*
dc.subject	discharge	en
dc.subject	impulse	en
dc.subject	cluster	en
dc.subject	plasmă	ro
dc.subject	impuls	ro
dc.subject	atomi	ro
dc.subject	molecule	ro
dc.subject	semiconductoare	ro
dc.title	Cercetări experimentale privind obţinerea peliculelor de oxizi pe suprafeţele semiconductoare cu aplicarea plasmei [Articol]	ro
dc.type	Article	en
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